Contact

Burg_Portrait.jpg
Thomas Burg
Max Planck Research Group Leader
Phone:+49 551 201-1187
Email:tburg@...

Max Planck Research Group Biological Micro- and Nanotechnology

Microfabrication

Spincoater

Photolithography

Wetbench

SPS Spin150 Spincoater
SPS Spin150
Pieces, 4'', 6''
max. 10 krpm

OAI Hybralign 400
OAI Hybralign 400
Pieces, 4''
Wetbench
Lotus Systems

Metal deposition

Parylene

Wirebonder

Moorfield Minilab Evaporator/Sputterer
Moorfield Minilab
Pieces, 4''
3 thermal sources
1 DC sputtering source

SCS PDS2010
SCS PDS2010
Parylene C
Wirebonder
TPT deep access bonder

Plasma cleaner

Reactive Ion Etcher

Diener Electronic Femto, 13.56 MHz
Diener Electronic Femto, 13.56 MHz
Pieces, 4''
South Bay Technology RIE2000
South Bay Technology RIE2000
Pieces, 4'', 6''
O2, CF4

External equipment

  • Deep silicon etching (DRIE)
  • Reactive Ion Etching and ion milling
  • Chemical Vapor Deposition (PECVD and LPCVD)
  • Physical Vapor Deposition (ebeam, sputtering)
  • Oxidation
  • Wafer bonding (anodic, fusion)
  • Chemical Mechanical Polishing (CMP)
  • Focused Ion Beam

Microscopy

Electron microscopy

  • Phenom G3 desktop SEM with EDX

Upright microscopes

  • Zeiss Axioscope.A1 (BF, DF, DIC, Fluorescence)
  • Nikon E600 (BF, Phase, Fluorescence)
  • Carl Zeiss Jena materials microscope

Inverted microscopes

  • Zeiss Axio Observer.Dm1 (BF, DF, DIC, Fluorescence)
  • Nikon Ti-E (BF, Phase, Fluorescence)
  • Motic AE31

CCD

  • Andor Clara
  • Andor DSD (white light confocal)
  • Andor Neo sCMOS
  • Casio Exilim F1

Wetlab

  • Nanodrop 3300 Fluorimeter
  • Nanodrop 2000c UV-Vis Spectrophotometer
  • Agilent 1100
  • Standard equipment
 
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