Facility for Field Emission Scanning Electron Microscopy

Facility for Field Emission Scanning Electron Microscopy

The facility within the Project Group of Nuclear Architecture operates a Hitachi S5500 scanning electron microscope (SEM). Equipped with a cold field emission cathode and a special electron optics ("inlens" system), this SEM is optimized for ultra-high resolutions in the low nanometer range within small area samples (< 10 mm2) at low acceleration voltages. In addition to the secondary electron detector, the device here is equipped with two return beam electron detectors and a STEM detector. The facility is focused on the investigation of subcellular structures. It offers support in particular in the production of biological samples and in evaluation with the S5500.

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